Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

Y. Zhuang; M. Vroubel; B. Rejaei; J. N. Burghartz; K. Attenborough

doi:10.1063/1.1857391

Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

Y. Zhuang, M. Vroubel, B. Rejaei, J. N. Burghartz, K. Attenborough

Research output: Contribution to journal › Article › peer-review

Abstract

A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (φ~1.0 μm). Nanonuclei (φ~30-50 nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ~50 mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency (~5.5 GHz) with a maximum quality factor (~3).

Original language	English
Article number	10N305
Journal	Journal of Applied Physics
Volume	97
Issue number	10
DOIs	https://doi.org/10.1063/1.1857391
State	Published - May 15 2005
Externally published	Yes
Event	49th Annual Conference on Magnetism and Magnetic Materials - Jacksonville, United States Duration: Nov 7 2004 → Nov 11 2004 Conference number: 49

ASJC Scopus Subject Areas

General Physics and Astronomy

Keywords

Magnetic anisotropy
C-MOS
Radiofrequency integrated circuits
Electromagnetic coils
Magnetic fields
Telecommunications engineering
Magnetic properties
Ferromagnetic resonance
Atomic force microscopy
Thin films

Disciplines

Electrical and Computer Engineering

Access to Document

10.1063/1.1857391

Cite this

@article{3e75141d558b42bea24ca9580fa01d4f,

title = "Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application",

abstract = "A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (φ~1.0 μm). Nanonuclei (φ~30-50 nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ~50 mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency (~5.5 GHz) with a maximum quality factor (~3).",

keywords = "Magnetic anisotropy, C-MOS, Radiofrequency integrated circuits, Electromagnetic coils, Magnetic fields, Telecommunications engineering, Magnetic properties, Ferromagnetic resonance, Atomic force microscopy, Thin films",

author = "Y. Zhuang and M. Vroubel and B. Rejaei and Burghartz, {J. N.} and K. Attenborough",

year = "2005",

month = may,

day = "15",

doi = "10.1063/1.1857391",

language = "English",

volume = "97",

journal = "Journal of Applied Physics",

issn = "0021-8979",

number = "10",

note = "49th Annual Conference on Magnetism and Magnetic Materials ; Conference date: 07-11-2004 Through 11-11-2004",

}

TY - JOUR

T1 - Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

AU - Zhuang, Y.

AU - Vroubel, M.

AU - Rejaei, B.

AU - Burghartz, J. N.

AU - Attenborough, K.

N1 - Conference code: 49

PY - 2005/5/15

Y1 - 2005/5/15

N2 - A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (φ~1.0 μm). Nanonuclei (φ~30-50 nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ~50 mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency (~5.5 GHz) with a maximum quality factor (~3).

AB - A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (φ~1.0 μm). Nanonuclei (φ~30-50 nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ~50 mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency (~5.5 GHz) with a maximum quality factor (~3).

KW - Magnetic anisotropy

KW - C-MOS

KW - Radiofrequency integrated circuits

KW - Electromagnetic coils

KW - Magnetic fields

KW - Telecommunications engineering

KW - Magnetic properties

KW - Ferromagnetic resonance

KW - Atomic force microscopy

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=20944440570&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=20944440570&partnerID=8YFLogxK

U2 - 10.1063/1.1857391

DO - 10.1063/1.1857391

M3 - Article

AN - SCOPUS:20944440570

SN - 0021-8979

VL - 97

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 10

M1 - 10N305

T2 - 49th Annual Conference on Magnetism and Magnetic Materials

Y2 - 7 November 2004 through 11 November 2004

ER -

Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

Abstract

ASJC Scopus Subject Areas

Keywords

Disciplines

Access to Document

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49th Annual Conference on Magnetism and Magnetic Materials

Cite this