Metalorganic chemical vapor deposition and characterization of ZnO materials

Shangzu Sun, Gary S. Tompa, Brent Hoerman, David C. Look, Bruce B. Claflin, Catherine E. Rice, Puneet Masaun

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)766-770
Number of pages5
JournalJournal of Electronic Materials
Volume35
Issue number4
DOIs
StatePublished - Apr 2006

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • Metalorganic chemical vapor deposition (MOCVD)
  • Transparent conducting oxide
  • Wide bandgap
  • ZnO

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