Metalorganic chemical vapor deposition and characterization of ZnO materials

  • Shangzu Sun
  • , Gary S. Tompa
  • , Brent Hoerman
  • , David C. Look
  • , Bruce B. Claflin
  • , Catherine E. Rice
  • , Puneet Masaun

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)766-770
Number of pages5
JournalJournal of Electronic Materials
Volume35
Issue number4
DOIs
StatePublished - Apr 2006

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • Metalorganic chemical vapor deposition (MOCVD)
  • Transparent conducting oxide
  • Wide bandgap
  • ZnO

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