Metalorganic chemical vapor deposition and characterization of ZnO materials

Shangzu Sun; Gary S. Tompa; Brent Hoerman; David C. Look; Bruce B. Claflin; Catherine E. Rice; Puneet Masaun

doi:10.1007/s11664-006-0136-7

Metalorganic chemical vapor deposition and characterization of ZnO materials

Shangzu Sun, Gary S. Tompa, Brent Hoerman, David C. Look, Bruce B. Claflin, Catherine E. Rice, Puneet Masaun

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	766-770
Number of pages	5
Journal	Journal of Electronic Materials
Volume	35
Issue number	4
DOIs	https://doi.org/10.1007/s11664-006-0136-7
State	Published - Apr 2006

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Keywords

Metalorganic chemical vapor deposition (MOCVD)
Transparent conducting oxide
Wide bandgap
ZnO

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10.1007/s11664-006-0136-7

Cite this

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title = "Metalorganic chemical vapor deposition and characterization of ZnO materials",

keywords = "Metalorganic chemical vapor deposition (MOCVD), Transparent conducting oxide, Wide bandgap, ZnO",

author = "Shangzu Sun and Tompa, \{Gary S.\} and Brent Hoerman and Look, \{David C.\} and Claflin, \{Bruce B.\} and Rice, \{Catherine E.\} and Puneet Masaun",

year = "2006",

month = apr,

doi = "10.1007/s11664-006-0136-7",

language = "English",

volume = "35",

pages = "766--770",

journal = "Journal of Electronic Materials",

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TY - JOUR

T1 - Metalorganic chemical vapor deposition and characterization of ZnO materials

AU - Sun, Shangzu

AU - Tompa, Gary S.

AU - Hoerman, Brent

AU - Look, David C.

AU - Claflin, Bruce B.

AU - Rice, Catherine E.

AU - Masaun, Puneet

PY - 2006/4

Y1 - 2006/4

KW - Metalorganic chemical vapor deposition (MOCVD)

KW - Transparent conducting oxide

KW - Wide bandgap

KW - ZnO

UR - https://www.scopus.com/pages/publications/33646741253

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U2 - 10.1007/s11664-006-0136-7

DO - 10.1007/s11664-006-0136-7

M3 - Article

AN - SCOPUS:33646741253

SN - 0361-5235

VL - 35

SP - 766

EP - 770

JO - Journal of Electronic Materials

JF - Journal of Electronic Materials

IS - 4

ER -

Metalorganic chemical vapor deposition and characterization of ZnO materials

ASJC Scopus Subject Areas

Keywords

Access to Document

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