@article{db48adb77dc5466eab6cac07caa7bc9d,
title = "Microwave imaging of etching-induced surface impedance modulation of graphene monolayer",
author = "Zhonghang Ji and Joshua Myers and Kathleen Brockdorf and Nick Engel and Shin Mou and Hong Huang and Yan Zhuang",
note = "Publisher Copyright: {\textcopyright} 2018 Author(s).",
year = "2018",
month = sep,
day = "1",
doi = "10.1116/1.5035417",
language = "English",
volume = "36",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
number = "5",
}