| Original language | English |
|---|---|
| Article number | 110694 |
| Journal | Materials Science in Semiconductor Processing |
| Volume | 210 |
| DOIs | |
| State | Published - Aug 1 2026 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
Keywords
- Airgap
- Band opening
- DFT
- Silicene
- Strain
- Two-dimension
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