Modification of Surface Characteristics in GaAs with Dry Processing

Y. Chung; D. W. Langer; R. Becker; D. Look

doi:10.1109/T-ED.1985.21906

Modification of Surface Characteristics in GaAs with Dry Processing

Y. Chung, D. W. Langer, R. Becker, D. Look

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	40-44
Number of pages	5
Journal	IEEE Transactions on Electron Devices
Volume	32
Issue number	1
DOIs	https://doi.org/10.1109/T-ED.1985.21906
State	Published - Jan 1985

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/T-ED.1985.21906

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title = "Modification of Surface Characteristics in GaAs with Dry Processing",

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AU - Becker, R.

AU - Look, D.

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JO - IEEE Transactions on Electron Devices

JF - IEEE Transactions on Electron Devices

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Modification of Surface Characteristics in GaAs with Dry Processing

ASJC Scopus Subject Areas

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