Process control and pulsed laser deposition of materials

R. Biggers; G. Kozlowski; J. Jones; D. Dempsey; R. Kleismit; I. Maartense; J. Busbee; T. Peterson; R. Perrin

doi:10.1080/10584580008222232

Process control and pulsed laser deposition of materials

R. Biggers, G. Kozlowski, J. Jones, D. Dempsey, R. Kleismit, I. Maartense, J. Busbee, T. Peterson, R. Perrin

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	201-211
Number of pages	11
Journal	Integrated Ferroelectrics
Volume	28
Issue number	1-4
DOIs	https://doi.org/10.1080/10584580008222232
State	Published - 2000
Externally published	Yes

ASJC Scopus Subject Areas

Control and Systems Engineering
Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Keywords

Emission Sensor
Ferroelectric
Process Control
Pulsed Laser Deposition
Superconductor

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10.1080/10584580008222232

Cite this

@article{4ff37c55b1f241a8a8aeeb58b505976f,

title = "Process control and pulsed laser deposition of materials",

keywords = "Emission Sensor, Ferroelectric, Process Control, Pulsed Laser Deposition, Superconductor",

author = "R. Biggers and G. Kozlowski and J. Jones and D. Dempsey and R. Kleismit and I. Maartense and J. Busbee and T. Peterson and R. Perrin",

year = "2000",

doi = "10.1080/10584580008222232",

language = "English",

volume = "28",

pages = "201--211",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

number = "1-4",

}

TY - JOUR

T1 - Process control and pulsed laser deposition of materials

AU - Biggers, R.

AU - Kozlowski, G.

AU - Jones, J.

AU - Dempsey, D.

AU - Kleismit, R.

AU - Maartense, I.

AU - Busbee, J.

AU - Peterson, T.

AU - Perrin, R.

PY - 2000

Y1 - 2000

KW - Emission Sensor

KW - Ferroelectric

KW - Process Control

KW - Pulsed Laser Deposition

KW - Superconductor

UR - http://www.scopus.com/inward/record.url?scp=0033661336&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033661336&partnerID=8YFLogxK

U2 - 10.1080/10584580008222232

DO - 10.1080/10584580008222232

M3 - Article

AN - SCOPUS:0033661336

SN - 1058-4587

VL - 28

SP - 201

EP - 211

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 1-4

ER -

Process control and pulsed laser deposition of materials

ASJC Scopus Subject Areas

Keywords

Access to Document

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