@article{4ff37c55b1f241a8a8aeeb58b505976f,
title = "Process control and pulsed laser deposition of materials",
keywords = "Emission Sensor, Ferroelectric, Process Control, Pulsed Laser Deposition, Superconductor",
author = "R. Biggers and G. Kozlowski and J. Jones and D. Dempsey and R. Kleismit and I. Maartense and J. Busbee and T. Peterson and R. Perrin",
year = "2000",
doi = "10.1080/10584580008222232",
language = "English",
volume = "28",
pages = "201--211",
journal = "Integrated Ferroelectrics",
issn = "1058-4587",
number = "1-4",
}