Properties of GaN epitaxial layers grown on 6H-SiC(0001) by plasma-assisted molecular beam epitaxy

C. D. Lee, V. Ramachandran, A. Sagar, R. M. Feenstra, D. W. Greve, W. L. Sarney, L. Salamanca-Riba, D. C. Look, Song Bai, W. J. Choyke, R. P. Devaty

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number10
Pages (from-to)162-169
Number of pages8
JournalJournal of Electronic Materials
Volume30
Issue number3
DOIs
StatePublished - 2001

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • Dislocation density
  • GaN
  • Molecular beam epitaxy
  • Scanning tunneling microscopy
  • SiC

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