Properties of GaN epitaxial layers grown on 6H-SiC(0001) by plasma-assisted molecular beam epitaxy

  • C. D. Lee
  • , V. Ramachandran
  • , A. Sagar
  • , R. M. Feenstra
  • , D. W. Greve
  • , W. L. Sarney
  • , L. Salamanca-Riba
  • , D. C. Look
  • , Song Bai
  • , W. J. Choyke
  • , R. P. Devaty

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number10
Pages (from-to)162-169
Number of pages8
JournalJournal of Electronic Materials
Volume30
Issue number3
DOIs
StatePublished - 2001

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • Dislocation density
  • GaN
  • Molecular beam epitaxy
  • Scanning tunneling microscopy
  • SiC

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