Remote hydrogen plasma doping of single crystal ZnO

Yuri M. Strzhemechny; Howard L. Mosbacker; David C. Look; Donald C. Reynolds; Cole W. Litton; Nelson Y. Garces; Nancy C. Giles; Larry E. Halliburton; Shigeru Niki; Leonard J. Brillson

doi:10.1063/1.1695440

Remote hydrogen plasma doping of single crystal ZnO

Yuri M. Strzhemechny, Howard L. Mosbacker, David C. Look, Donald C. Reynolds, Cole W. Litton, Nelson Y. Garces, Nancy C. Giles, Larry E. Halliburton, Shigeru Niki, Leonard J. Brillson

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2545-2547
Number of pages	3
Journal	Applied Physics Letters
Volume	84
Issue number	14
DOIs	https://doi.org/10.1063/1.1695440
State	Published - Apr 5 2004

ASJC Scopus Subject Areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.1695440

Cite this

@article{25a19971eb6d4145b1873cd30b52d840,

title = "Remote hydrogen plasma doping of single crystal ZnO",

author = "Strzhemechny, \{Yuri M.\} and Mosbacker, \{Howard L.\} and Look, \{David C.\} and Reynolds, \{Donald C.\} and Litton, \{Cole W.\} and Garces, \{Nelson Y.\} and Giles, \{Nancy C.\} and Halliburton, \{Larry E.\} and Shigeru Niki and Brillson, \{Leonard J.\}",

year = "2004",

month = apr,

day = "5",

doi = "10.1063/1.1695440",

language = "English",

volume = "84",

pages = "2545--2547",

journal = "Applied Physics Letters",

issn = "0003-6951",

number = "14",

}

TY - JOUR

T1 - Remote hydrogen plasma doping of single crystal ZnO

AU - Strzhemechny, Yuri M.

AU - Mosbacker, Howard L.

AU - Look, David C.

AU - Reynolds, Donald C.

AU - Litton, Cole W.

AU - Garces, Nelson Y.

AU - Giles, Nancy C.

AU - Halliburton, Larry E.

AU - Niki, Shigeru

AU - Brillson, Leonard J.

PY - 2004/4/5

Y1 - 2004/4/5

UR - https://www.scopus.com/pages/publications/2342521249

UR - https://www.scopus.com/inward/citedby.url?scp=2342521249&partnerID=8YFLogxK

U2 - 10.1063/1.1695440

DO - 10.1063/1.1695440

M3 - Article

AN - SCOPUS:2342521249

SN - 0003-6951

VL - 84

SP - 2545

EP - 2547

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 14

ER -

Remote hydrogen plasma doping of single crystal ZnO

ASJC Scopus Subject Areas

Access to Document

Other files and links

Cite this