Remote hydrogen plasma processing of ZnO single crystal surfaces

Yuri M. Strzhemechny; John Nemergut; Phillip E. Smith; Junjik Bae; David C. Look; Leonard J. Brillson

doi:10.1063/1.1606859

Remote hydrogen plasma processing of ZnO single crystal surfaces

Yuri M. Strzhemechny, John Nemergut, Phillip E. Smith, Junjik Bae, David C. Look, Leonard J. Brillson

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	4256-4262
Number of pages	7
Journal	Journal of Applied Physics
Volume	94
Issue number	7
DOIs	https://doi.org/10.1063/1.1606859
State	Published - Oct 1 2003

ASJC Scopus Subject Areas

General Physics and Astronomy

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10.1063/1.1606859

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title = "Remote hydrogen plasma processing of ZnO single crystal surfaces",

author = "Strzhemechny, {Yuri M.} and John Nemergut and Smith, {Phillip E.} and Junjik Bae and Look, {David C.} and Brillson, {Leonard J.}",

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AU - Strzhemechny, Yuri M.

AU - Nemergut, John

AU - Smith, Phillip E.

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AU - Look, David C.

AU - Brillson, Leonard J.

PY - 2003/10/1

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EP - 4262

JO - Journal of Applied Physics

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Remote hydrogen plasma processing of ZnO single crystal surfaces

ASJC Scopus Subject Areas

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