Remote hydrogen plasma processing of ZnO single crystal surfaces

Yuri M. Strzhemechny; John Nemergut; Phillip E. Smith; Junjik Bae; David C. Look; Leonard J. Brillson

doi:10.1063/1.1606859

Remote hydrogen plasma processing of ZnO single crystal surfaces

Yuri M. Strzhemechny
, John Nemergut
, Phillip E. Smith
, Junjik Bae
, David C. Look
, Leonard J. Brillson

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	4256-4262
Number of pages	7
Journal	Journal of Applied Physics
Volume	94
Issue number	7
DOIs	https://doi.org/10.1063/1.1606859
State	Published - Oct 1 2003

ASJC Scopus Subject Areas

General Physics and Astronomy

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10.1063/1.1606859

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@article{574ce75364844fefb88f98d1de8ddbef,

title = "Remote hydrogen plasma processing of ZnO single crystal surfaces",

author = "Strzhemechny, \{Yuri M.\} and John Nemergut and Smith, \{Phillip E.\} and Junjik Bae and Look, \{David C.\} and Brillson, \{Leonard J.\}",

year = "2003",

month = oct,

day = "1",

doi = "10.1063/1.1606859",

language = "English",

volume = "94",

pages = "4256--4262",

journal = "Journal of Applied Physics",

issn = "0021-8979",

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}

TY - JOUR

T1 - Remote hydrogen plasma processing of ZnO single crystal surfaces

AU - Strzhemechny, Yuri M.

AU - Nemergut, John

AU - Smith, Phillip E.

AU - Bae, Junjik

AU - Look, David C.

AU - Brillson, Leonard J.

PY - 2003/10/1

Y1 - 2003/10/1

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UR - https://www.scopus.com/pages/publications/0142055924#tab=citedBy

U2 - 10.1063/1.1606859

DO - 10.1063/1.1606859

M3 - Article

AN - SCOPUS:0142055924

SN - 0021-8979

VL - 94

SP - 4256

EP - 4262

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 7

ER -

Remote hydrogen plasma processing of ZnO single crystal surfaces

ASJC Scopus Subject Areas

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