@article{5cca845261104b88a57461cc555c2e86,
title = "Remote plasma-enhanced chemical vapor deposition of GeSn on Si (100), Si (111), sapphire, and fused silica substrates",
author = "B. Claflin and Grzybowski, \{G. J.\} and S. Zollner and Rogers, \{B. R.\} and Cooper, \{T. A.\} and Look, \{D. C.\}",
note = "Publisher Copyright: {\textcopyright} 2024 Author(s).",
year = "2024",
month = sep,
day = "1",
doi = "10.1116/6.0003689",
language = "English",
volume = "42",
journal = "Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics",
issn = "2166-2746",
number = "5",
}