@inproceedings{40b852da8ee74233a8943b766a25d471,
title = "Residual stress characterization in MEMS microbridges using micro-Raman spectroscopy",
keywords = "MEMS, MUMPs, Raman spectroscopy, Residual stress, Stress characterization",
author = "Starman, {L. A.} and Ochoa, {E. M.} and Lott, {J. A.} and Amer, {M. S.} and Cowan, {W. D.} and Busbee, {J. D.}",
year = "2002",
language = "English",
isbn = "0970827571",
series = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002",
pages = "314--317",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002",
note = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002 ; Conference date: 21-04-2002 Through 25-04-2002",
}