Residual stress characterization in MEMS microbridges using micro-Raman spectroscopy

L. A. Starman; E. M. Ochoa; J. A. Lott; M. S. Amer; W. D. Cowan; J. D. Busbee

Residual stress characterization in MEMS microbridges using micro-Raman spectroscopy

L. A. Starman, E. M. Ochoa, J. A. Lott, M. S. Amer, W. D. Cowan, J. D. Busbee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002
Editors	M. Laudon, B. Romanowicz
Pages	314-317
Number of pages	4
State	Published - 2002
Externally published	Yes
Event	2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002 - San Juan, Puerto Rico Duration: Apr 21 2002 → Apr 25 2002

Publication series

Name	2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Conference

Conference	2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002
Country/Territory	Puerto Rico
City	San Juan
Period	4/21/02 → 4/25/02

ASJC Scopus Subject Areas

General Engineering

Keywords

MEMS
MUMPs
Raman spectroscopy
Residual stress
Stress characterization

Cite this

Starman, L. A., Ochoa, E. M., Lott, J. A., Amer, M. S., Cowan, W. D., & Busbee, J. D. (2002). Residual stress characterization in MEMS microbridges using micro-Raman spectroscopy. In M. Laudon, & B. Romanowicz (Eds.), 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002 (pp. 314-317). (2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002).

Residual stress characterization in MEMS microbridges using micro-Raman spectroscopy. / Starman, L. A.; Ochoa, E. M.; Lott, J. A. et al.
2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002. ed. / M. Laudon; B. Romanowicz. 2002. p. 314-317 (2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Starman, LA, Ochoa, EM, Lott, JA, Amer, MS, Cowan, WD & Busbee, JD 2002, Residual stress characterization in MEMS microbridges using micro-Raman spectroscopy. in M Laudon & B Romanowicz (eds), 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002. 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002, pp. 314-317, 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002, San Juan, Puerto Rico, 4/21/02.

Starman LA, Ochoa EM, Lott JA, Amer MS, Cowan WD, Busbee JD. Residual stress characterization in MEMS microbridges using micro-Raman spectroscopy. In Laudon M, Romanowicz B, editors, 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002. 2002. p. 314-317. (2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002).

@inproceedings{40b852da8ee74233a8943b766a25d471,

title = "Residual stress characterization in MEMS microbridges using micro-Raman spectroscopy",

keywords = "MEMS, MUMPs, Raman spectroscopy, Residual stress, Stress characterization",

author = "Starman, \{L. A.\} and Ochoa, \{E. M.\} and Lott, \{J. A.\} and Amer, \{M. S.\} and Cowan, \{W. D.\} and Busbee, \{J. D.\}",

year = "2002",

language = "English",

isbn = "0970827571",

series = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002",

pages = "314--317",

editor = "M. Laudon and B. Romanowicz",

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note = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002 ; Conference date: 21-04-2002 Through 25-04-2002",

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TY - GEN

T1 - Residual stress characterization in MEMS microbridges using micro-Raman spectroscopy

AU - Starman, L. A.

AU - Ochoa, E. M.

AU - Lott, J. A.

AU - Amer, M. S.

AU - Cowan, W. D.

AU - Busbee, J. D.

PY - 2002

Y1 - 2002

KW - MEMS

KW - MUMPs

KW - Raman spectroscopy

KW - Residual stress

KW - Stress characterization

UR - https://www.scopus.com/pages/publications/6344286079

UR - https://www.scopus.com/inward/citedby.url?scp=6344286079&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:6344286079

SN - 0970827571

SN - 9780970827579

T3 - 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

SP - 314

EP - 317

BT - 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

A2 - Laudon, M.

A2 - Romanowicz, B.

T2 - 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Y2 - 21 April 2002 through 25 April 2002

ER -

Residual stress characterization in MEMS microbridges using micro-Raman spectroscopy

Publication series

Conference

ASJC Scopus Subject Areas

Keywords

Other files and links

Cite this