RF MEMS for Digitally-Controlled Front-End Components

Research output: Contribution to journalConference articlepeer-review

Abstract

Microelectromechanical system (MEMS) technology has grown at a very fast pace over the past couple of years. This can be attributed to the ability of this technology to miniaturize, reduce the cost, and improve the performance of actuators and transducers, which were previously designed using hybrid technology.
Original languageEnglish
Pages (from-to)338
Number of pages1
JournalProceedings of the Annual IEEE International Conference on Innovative Systems in Silicon
DOIs
StatePublished - 1997
Externally publishedYes
EventProceedings of the 1997 2nd Annual IEEE International Conference on Innovative Systems in Silicon - Austin, TX, USA
Duration: Oct 8 1997Oct 10 1997

ASJC Scopus Subject Areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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