Abstract
Microelectromechanical system (MEMS) technology has grown at a very fast pace over the past couple of years. This can be attributed to the ability of this technology to miniaturize, reduce the cost, and improve the performance of actuators and transducers, which were previously designed using hybrid technology.
| Original language | English |
|---|---|
| Pages (from-to) | 338 |
| Number of pages | 1 |
| Journal | Proceedings of the Annual IEEE International Conference on Innovative Systems in Silicon |
| DOIs | |
| State | Published - 1997 |
| Externally published | Yes |
| Event | Proceedings of the 1997 2nd Annual IEEE International Conference on Innovative Systems in Silicon - Austin, TX, USA Duration: Oct 8 1997 → Oct 10 1997 |
ASJC Scopus Subject Areas
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Hardware and Architecture