Self-Aligned GaAs MISFET's with a Low-Temperature-Grown GaAs Gate Insulator

C. L. Chen; L. J. Mahoney; K. B. Nichols; M. J. Manfra; B. F. Gramstorff; K. M. Molvar; R. A. Murphy; E. R. Brown

doi:10.1109/55.382239

Self-Aligned GaAs MISFET's with a Low-Temperature-Grown GaAs Gate Insulator

C. L. Chen, L. J. Mahoney, K. B. Nichols, M. J. Manfra, B. F. Gramstorff, K. M. Molvar, R. A. Murphy, E. R. Brown

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	199-201
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	16
Issue number	5
DOIs	https://doi.org/10.1109/55.382239
State	Published - May 1995
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/55.382239

Cite this

@article{2e4903012c8e4c32bcd3880d2ef24bbd,

title = "Self-Aligned GaAs MISFET's with a Low-Temperature-Grown GaAs Gate Insulator",

author = "Chen, \{C. L.\} and Mahoney, \{L. J.\} and Nichols, \{K. B.\} and Manfra, \{M. J.\} and Gramstorff, \{B. F.\} and Molvar, \{K. M.\} and Murphy, \{R. A.\} and Brown, \{E. R.\}",

year = "1995",

month = may,

doi = "10.1109/55.382239",

language = "English",

volume = "16",

pages = "199--201",

journal = "IEEE Electron Device Letters",

issn = "0741-3106",

number = "5",

}

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T1 - Self-Aligned GaAs MISFET's with a Low-Temperature-Grown GaAs Gate Insulator

AU - Chen, C. L.

AU - Mahoney, L. J.

AU - Nichols, K. B.

AU - Manfra, M. J.

AU - Gramstorff, B. F.

AU - Molvar, K. M.

AU - Murphy, R. A.

AU - Brown, E. R.

PY - 1995/5

Y1 - 1995/5

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U2 - 10.1109/55.382239

DO - 10.1109/55.382239

M3 - Article

AN - SCOPUS:0029306861

SN - 0741-3106

VL - 16

SP - 199

EP - 201

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 5

ER -

Self-Aligned GaAs MISFET's with a Low-Temperature-Grown GaAs Gate Insulator

ASJC Scopus Subject Areas

Access to Document

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