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Self-Aligned GaAs MISFET's with a Low-Temperature-Grown GaAs Gate Insulator

  • C. L. Chen
  • , L. J. Mahoney
  • , K. B. Nichols
  • , M. J. Manfra
  • , B. F. Gramstorff
  • , K. M. Molvar
  • , R. A. Murphy
  • , E. R. Brown

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)199-201
Number of pages3
JournalIEEE Electron Device Letters
Volume16
Issue number5
DOIs
StatePublished - May 1995
Externally publishedYes

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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