@article{a2543e56b59e43c3a3d1f4bd703cd9b0,
title = "Shallow donor generation in ZnO by remote hydrogen plasma",
keywords = "Hydrogen plasma, Shallow donor, ZnO",
author = "Strzhemechny, {Yuri M.} and Mosbacker, {Howard L.} and Goss, {Stephen H.} and Look, {David C.} and Reynolds, {Donald C.} and Litton, {Cole W.} and Garces, {Nelson Y.} and Giles, {Nancy C.} and Halliburton, {Larry E.} and Shigeru Niki and Brillson, {Leonard J.}",
year = "2005",
month = apr,
doi = "10.1007/s11664-005-0118-1",
language = "English",
volume = "34",
pages = "399--403",
journal = "Journal of Electronic Materials",
issn = "0361-5235",
number = "4",
}