Shallow donor generation in ZnO by remote hydrogen plasma

Yuri M. Strzhemechny, Howard L. Mosbacker, Stephen H. Goss, David C. Look, Donald C. Reynolds, Cole W. Litton, Nelson Y. Garces, Nancy C. Giles, Larry E. Halliburton, Shigeru Niki, Leonard J. Brillson

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)399-403
Number of pages5
JournalJournal of Electronic Materials
Volume34
Issue number4
DOIs
StatePublished - Apr 2005

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • Hydrogen plasma
  • Shallow donor
  • ZnO

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