@article{a2543e56b59e43c3a3d1f4bd703cd9b0,
title = "Shallow donor generation in ZnO by remote hydrogen plasma",
keywords = "Hydrogen plasma, Shallow donor, ZnO",
author = "Strzhemechny, \{Yuri M.\} and Mosbacker, \{Howard L.\} and Goss, \{Stephen H.\} and Look, \{David C.\} and Reynolds, \{Donald C.\} and Litton, \{Cole W.\} and Garces, \{Nelson Y.\} and Giles, \{Nancy C.\} and Halliburton, \{Larry E.\} and Shigeru Niki and Brillson, \{Leonard J.\}",
year = "2005",
month = apr,
doi = "10.1007/s11664-005-0118-1",
language = "English",
volume = "34",
pages = "399--403",
journal = "Journal of Electronic Materials",
issn = "0361-5235",
number = "4",
}