Shallow donor generation in ZnO by remote hydrogen plasma

Yuri M. Strzhemechny; Howard L. Mosbacker; Stephen H. Goss; David C. Look; Donald C. Reynolds; Cole W. Litton; Nelson Y. Garces; Nancy C. Giles; Larry E. Halliburton; Shigeru Niki; Leonard J. Brillson

doi:10.1007/s11664-005-0118-1

Shallow donor generation in ZnO by remote hydrogen plasma

Yuri M. Strzhemechny, Howard L. Mosbacker, Stephen H. Goss, David C. Look, Donald C. Reynolds, Cole W. Litton, Nelson Y. Garces, Nancy C. Giles, Larry E. Halliburton, Shigeru Niki, Leonard J. Brillson

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	399-403
Number of pages	5
Journal	Journal of Electronic Materials
Volume	34
Issue number	4
DOIs	https://doi.org/10.1007/s11664-005-0118-1
State	Published - Apr 2005

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

Keywords

Hydrogen plasma
Shallow donor
ZnO

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10.1007/s11664-005-0118-1

Cite this

@article{a2543e56b59e43c3a3d1f4bd703cd9b0,

title = "Shallow donor generation in ZnO by remote hydrogen plasma",

keywords = "Hydrogen plasma, Shallow donor, ZnO",

author = "Strzhemechny, \{Yuri M.\} and Mosbacker, \{Howard L.\} and Goss, \{Stephen H.\} and Look, \{David C.\} and Reynolds, \{Donald C.\} and Litton, \{Cole W.\} and Garces, \{Nelson Y.\} and Giles, \{Nancy C.\} and Halliburton, \{Larry E.\} and Shigeru Niki and Brillson, \{Leonard J.\}",

year = "2005",

month = apr,

doi = "10.1007/s11664-005-0118-1",

language = "English",

volume = "34",

pages = "399--403",

journal = "Journal of Electronic Materials",

issn = "0361-5235",

number = "4",

}

TY - JOUR

T1 - Shallow donor generation in ZnO by remote hydrogen plasma

AU - Strzhemechny, Yuri M.

AU - Mosbacker, Howard L.

AU - Goss, Stephen H.

AU - Look, David C.

AU - Reynolds, Donald C.

AU - Litton, Cole W.

AU - Garces, Nelson Y.

AU - Giles, Nancy C.

AU - Halliburton, Larry E.

AU - Niki, Shigeru

AU - Brillson, Leonard J.

PY - 2005/4

Y1 - 2005/4

KW - Hydrogen plasma

KW - Shallow donor

KW - ZnO

UR - https://www.scopus.com/pages/publications/18244385482

UR - https://www.scopus.com/inward/citedby.url?scp=18244385482&partnerID=8YFLogxK

U2 - 10.1007/s11664-005-0118-1

DO - 10.1007/s11664-005-0118-1

M3 - Article

AN - SCOPUS:18244385482

SN - 0361-5235

VL - 34

SP - 399

EP - 403

JO - Journal of Electronic Materials

JF - Journal of Electronic Materials

IS - 4

ER -

Shallow donor generation in ZnO by remote hydrogen plasma

ASJC Scopus Subject Areas

Keywords

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