Si content variation and influence of deposition atmosphere in homoepitaxial Si-doped β -Ga2O3 films by pulsed laser deposition

Kevin D. Leedy; Kelson D. Chabak; Vladimir Vasilyev; David C. Look; Krishnamurthy Mahalingam; Jeff L. Brown; Andrew J. Green; Cynthia T. Bowers; Antonio Crespo; Darren B. Thomson; Gregg H. Jessen

doi:10.1063/1.5047214

Si content variation and influence of deposition atmosphere in homoepitaxial Si-doped β -Ga₂O₃ films by pulsed laser deposition

Kevin D. Leedy
, Kelson D. Chabak
, Vladimir Vasilyev
, David C. Look
, Krishnamurthy Mahalingam
, Jeff L. Brown
, Andrew J. Green
, Cynthia T. Bowers
, Antonio Crespo
, Darren B. Thomson
, Gregg H. Jessen

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	101102
Journal	APL Materials
Volume	6
Issue number	10
DOIs	https://doi.org/10.1063/1.5047214
State	Published - Oct 1 2018

ASJC Scopus Subject Areas

General Materials Science
General Engineering

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10.1063/1.5047214

Cite this

@article{d8c0a1cc10964cd5bc40d02cf95fab72,

title = "Si content variation and influence of deposition atmosphere in homoepitaxial Si-doped β -Ga2O3 films by pulsed laser deposition",

author = "Leedy, \{Kevin D.\} and Chabak, \{Kelson D.\} and Vladimir Vasilyev and Look, \{David C.\} and Krishnamurthy Mahalingam and Brown, \{Jeff L.\} and Green, \{Andrew J.\} and Bowers, \{Cynthia T.\} and Antonio Crespo and Thomson, \{Darren B.\} and Jessen, \{Gregg H.\}",

note = "Publisher Copyright: {\textcopyright} 2018 Author(s).",

year = "2018",

month = oct,

day = "1",

doi = "10.1063/1.5047214",

language = "English",

volume = "6",

journal = "APL Materials",

issn = "2166-532X",

number = "10",

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TY - JOUR

T1 - Si content variation and influence of deposition atmosphere in homoepitaxial Si-doped β -Ga2O3 films by pulsed laser deposition

AU - Leedy, Kevin D.

AU - Chabak, Kelson D.

AU - Vasilyev, Vladimir

AU - Look, David C.

AU - Mahalingam, Krishnamurthy

AU - Brown, Jeff L.

AU - Green, Andrew J.

AU - Bowers, Cynthia T.

AU - Crespo, Antonio

AU - Thomson, Darren B.

AU - Jessen, Gregg H.

PY - 2018/10/1

Y1 - 2018/10/1

UR - https://www.scopus.com/pages/publications/85054391306

UR - https://www.scopus.com/pages/publications/85054391306#tab=citedBy

U2 - 10.1063/1.5047214

DO - 10.1063/1.5047214

M3 - Article

AN - SCOPUS:85054391306

SN - 2166-532X

VL - 6

JO - APL Materials

JF - APL Materials

IS - 10

M1 - 101102

ER -

Si content variation and influence of deposition atmosphere in homoepitaxial Si-doped β -Ga2O3 films by pulsed laser deposition

ASJC Scopus Subject Areas

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Si content variation and influence of deposition atmosphere in homoepitaxial Si-doped β -Ga₂O₃ films by pulsed laser deposition