@article{d488c7c0ef9e4bbe99fb3474a8d2c573,
title = "Stress characterization of MEMS microbridges by micro-Raman spectroscopy",
keywords = "MEMS, MUMPs, Polysilicon, Raman spectroscopy, Residual stress",
author = "Starman, {L. A.} and Lott, {J. A.} and Amer, {M. S.} and Cowan, {W. D.} and Busbee, {J. D.}",
year = "2003",
month = apr,
day = "15",
doi = "10.1016/S0924-4247(02)00432-6",
language = "English",
volume = "104",
pages = "107--116",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
number = "2",
}