@article{d488c7c0ef9e4bbe99fb3474a8d2c573,
title = "Stress characterization of MEMS microbridges by micro-Raman spectroscopy",
keywords = "MEMS, MUMPs, Polysilicon, Raman spectroscopy, Residual stress",
author = "Starman, \{L. A.\} and Lott, \{J. A.\} and Amer, \{M. S.\} and Cowan, \{W. D.\} and Busbee, \{J. D.\}",
year = "2003",
month = apr,
day = "15",
doi = "10.1016/S0924-4247(02)00432-6",
language = "English",
volume = "104",
pages = "107--116",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
number = "2",
}