Abstract
We have studied the surface scattering of x rays from mechanical‐chemical polished InP (001) wafers with sulfur and/or iron doping. The scattering intensities in the scans transverse to the specular reflection rod were found to contain two components. A simple surface model was proposed to explain the experimental data. The results were also compared with those obtained from crystal truncation rod measurements.
Original language | American English |
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Pages (from-to) | 3317–3319 |
Journal | Applied Physics Letters |
Volume | 65 |
Issue number | 26 |
DOIs | |
State | Published - Dec 26 1994 |
Externally published | Yes |
Keywords
- X-ray diffraction
Disciplines
- Electrical and Computer Engineering