Abstract
he dynamics of tho laser ablation plume, including the shape of the plume, are understood to be important for good film depositions and and understanding of the dynamics are necessary for a process control to be effective. Recent experiments indicate that the substrate heater is a strong control parameter. The purpose of this paper is to analytically interpret these results from the point of view of shock dynamics and to compare with numerical flow simulations. Copyright © 2005 by the American Institute of Aeronautics and Astronautics, Inc. All rights reserved.
Original language | American English |
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Journal | 43rd AIAA Aerospace Sciences Meeting and Exhibit - Meeting Papers |
State | Published - Dec 1 2005 |