The van der pauw stress sensor

Ahsan Mian; Jeffrey C. Suhling; Richard C. Jaeger

doi:10.1109/JSEN.2006.870140

The van der pauw stress sensor

Ahsan Mian, Jeffrey C. Suhling, Richard C. Jaeger

Wright State University

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	340-355
Number of pages	16
Journal	IEEE Sensors Journal
Volume	6
Issue number	2
DOIs	https://doi.org/10.1109/JSEN.2006.870140
State	Published - Apr 1 2006

ASJC Scopus Subject Areas

Instrumentation
Electrical and Electronic Engineering

Keywords

Piezoresistance
Silicon sensor
Stress sensor
Stress test chip
Van der pauw (VDP) structure

Disciplines

Engineering
Materials Science and Engineering
Mechanical Engineering

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10.1109/JSEN.2006.870140

Cite this

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title = "The van der pauw stress sensor",

keywords = "Piezoresistance, Silicon sensor, Stress sensor, Stress test chip, Van der pauw (VDP) structure",

author = "Ahsan Mian and Suhling, {Jeffrey C.} and Jaeger, {Richard C.}",

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journal = "IEEE Sensors Journal",

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AU - Mian, Ahsan

AU - Suhling, Jeffrey C.

AU - Jaeger, Richard C.

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KW - Piezoresistance

KW - Silicon sensor

KW - Stress sensor

KW - Stress test chip

KW - Van der pauw (VDP) structure

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The van der pauw stress sensor

ASJC Scopus Subject Areas

Keywords

Disciplines

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