The van der pauw stress sensor

Ahsan Mian; Jeffrey C. Suhling; Richard C. Jaeger

doi:10.1109/JSEN.2006.870140

The van der pauw stress sensor

Ahsan Mian
, Jeffrey C. Suhling
, Richard C. Jaeger

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	340-355
Number of pages	16
Journal	IEEE Sensors Journal
Volume	6
Issue number	2
DOIs	https://doi.org/10.1109/JSEN.2006.870140
State	Published - Apr 2006
Externally published	Yes

ASJC Scopus Subject Areas

Instrumentation
Electrical and Electronic Engineering

Keywords

Piezoresistance
Silicon sensor
Stress sensor
Stress test chip
Van der pauw (VDP) structure

Access to Document

10.1109/JSEN.2006.870140

Cite this

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title = "The van der pauw stress sensor",

keywords = "Piezoresistance, Silicon sensor, Stress sensor, Stress test chip, Van der pauw (VDP) structure",

author = "Ahsan Mian and Suhling, \{Jeffrey C.\} and Jaeger, \{Richard C.\}",

year = "2006",

month = apr,

doi = "10.1109/JSEN.2006.870140",

language = "English",

volume = "6",

pages = "340--355",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

number = "2",

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TY - JOUR

T1 - The van der pauw stress sensor

AU - Mian, Ahsan

AU - Suhling, Jeffrey C.

AU - Jaeger, Richard C.

PY - 2006/4

Y1 - 2006/4

KW - Piezoresistance

KW - Silicon sensor

KW - Stress sensor

KW - Stress test chip

KW - Van der pauw (VDP) structure

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UR - https://www.scopus.com/pages/publications/33645139629#tab=citedBy

U2 - 10.1109/JSEN.2006.870140

DO - 10.1109/JSEN.2006.870140

M3 - Article

AN - SCOPUS:33645139629

SN - 1530-437X

VL - 6

SP - 340

EP - 355

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 2

ER -

The van der pauw stress sensor

ASJC Scopus Subject Areas

Keywords

Access to Document

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Cite this