Original language | English |
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Pages (from-to) | 1929-1935 |
Number of pages | 7 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 23 |
Issue number | 5 |
DOIs | |
State | Published - 2005 |
Externally published | Yes |
ASJC Scopus Subject Areas
- Condensed Matter Physics
- Electrical and Electronic Engineering