Tunable stoichiometry of SiOx-BaTiOy-BOz fabricated by multitarget pulsed laser deposition

  • John G. Jones
  • , Jonathan T. Goldstein
  • , Steven R. Smith
  • , Gerald R. Landis
  • , Lawrence Grazulis
  • , Lirong Sun
  • , Neil R. Murphy
  • , Gregory Kozlowski
  • , Rachel Jakubiak
  • , Charles E. Stutz

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number093590
JournalJournal of Nanophotonics
Volume9
Issue number1
DOIs
StatePublished - Jan 1 2015

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Keywords

  • ellipsometry
  • multitarget
  • pulsed laser deposition
  • tunable stoichiometry

Disciplines

  • Physical Sciences and Mathematics
  • Physics

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