Uniformity of 3-in., semi-insulating, vertical-gradient-freeze GaAs wafers

D. C. Look; D. C. Walters; M. G. Mier; J. S. Sewell; J. S. Sizelove; A. Akselrad; J. E. Clemans

doi:10.1063/1.344458

Uniformity of 3-in., semi-insulating, vertical-gradient-freeze GaAs wafers

D. C. Look
, D. C. Walters
, M. G. Mier
, J. S. Sewell
, J. S. Sizelove
, A. Akselrad
, J. E. Clemans

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1000-1002
Number of pages	3
Journal	Journal of Applied Physics
Volume	66
Issue number	2
DOIs	https://doi.org/10.1063/1.344458
State	Published - 1989

ASJC Scopus Subject Areas

General Physics and Astronomy

Access to Document

10.1063/1.344458

Cite this

@article{7c016034556b45a9955eebb9ec59a7b3,

title = "Uniformity of 3-in., semi-insulating, vertical-gradient-freeze GaAs wafers",

author = "Look, \{D. C.\} and Walters, \{D. C.\} and Mier, \{M. G.\} and Sewell, \{J. S.\} and Sizelove, \{J. S.\} and A. Akselrad and Clemans, \{J. E.\}",

year = "1989",

doi = "10.1063/1.344458",

language = "English",

volume = "66",

pages = "1000--1002",

journal = "Journal of Applied Physics",

issn = "0021-8979",

number = "2",

}

TY - JOUR

T1 - Uniformity of 3-in., semi-insulating, vertical-gradient-freeze GaAs wafers

AU - Look, D. C.

AU - Walters, D. C.

AU - Mier, M. G.

AU - Sewell, J. S.

AU - Sizelove, J. S.

AU - Akselrad, A.

AU - Clemans, J. E.

PY - 1989

Y1 - 1989

UR - https://www.scopus.com/pages/publications/3142549379

UR - https://www.scopus.com/pages/publications/3142549379#tab=citedBy

U2 - 10.1063/1.344458

DO - 10.1063/1.344458

M3 - Article

AN - SCOPUS:3142549379

SN - 0021-8979

VL - 66

SP - 1000

EP - 1002

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 2

ER -

Uniformity of 3-in., semi-insulating, vertical-gradient-freeze GaAs wafers

ASJC Scopus Subject Areas

Access to Document

Other files and links

Cite this