Original language | English |
---|---|
Pages (from-to) | 1722-1725 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
Volume | 27 |
Issue number | 3 |
DOIs | |
State | Published - 2009 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
- Materials Chemistry