@article{b40f9ba9b1f54027945ca7a4907d9cdb,
title = "Wafer-level correlations of EL2, dislocation density, and FET saturation current at various processing stages",
keywords = "Correlations, dislocation density, EL2, saturation current",
author = "Look, {D. C.} and Walters, {D. C.} and Kemerley, {R. T.} and King, {J. M.} and Mier, {M. G.} and Sewell, {J. S.} and Sizelove, {J. S.}",
year = "1989",
month = jul,
doi = "10.1007/BF02657777",
language = "English",
volume = "18",
pages = "487--492",
journal = "Journal of Electronic Materials",
issn = "0361-5235",
number = "4",
}