@article{1703fbf60eb84a7d924d3f2c0cc48600,
title = "Wet chemical digital etching of GaAs at room temperature",
author = "DeSalvo, {Gregory C.} and Bozada, {Christopher A.} and Ebel, {John L.} and Look, {David C.} and Barrette, {John P.} and Cerny, {Charles L.A.} and Dettmer, {Ross W.} and Gillespie, {James K.} and Havasy, {Charles K.} and Jenkins, {Thomas J.} and Kenichi Nakano and Pettiford, {Carl I.} and Quach, {Tony K.} and Sewell, {James S.} and Via, {G. David}",
year = "1996",
month = nov,
doi = "10.1149/1.1837266",
language = "English",
volume = "143",
pages = "3652--3656",
journal = "Journal of the Electrochemical Society",
issn = "0013-4651",
number = "11",
}