Wet chemical digital etching of GaAs at room temperature

Gregory C. DeSalvo; Christopher A. Bozada; John L. Ebel; David C. Look; John P. Barrette; Charles L.A. Cerny; Ross W. Dettmer; James K. Gillespie; Charles K. Havasy; Thomas J. Jenkins; Kenichi Nakano; Carl I. Pettiford; Tony K. Quach; James S. Sewell; G. David Via

doi:10.1149/1.1837266

Wet chemical digital etching of GaAs at room temperature

Gregory C. DeSalvo
, Christopher A. Bozada
, John L. Ebel
, David C. Look
, John P. Barrette
, Charles L.A. Cerny
, Ross W. Dettmer
, James K. Gillespie
, Charles K. Havasy
, Thomas J. Jenkins
, Kenichi Nakano
, Carl I. Pettiford
, Tony K. Quach
, James S. Sewell
, G. David Via

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	3652-3656
Number of pages	5
Journal	Journal of the Electrochemical Society
Volume	143
Issue number	11
DOIs	https://doi.org/10.1149/1.1837266
State	Published - Nov 1996

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Renewable Energy, Sustainability and the Environment
Condensed Matter Physics
Surfaces, Coatings and Films
Electrochemistry
Materials Chemistry

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10.1149/1.1837266

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DeSalvo, G. C., Bozada, C. A., Ebel, J. L., Look, D. C., Barrette, J. P., Cerny, C. L. A., Dettmer, R. W., Gillespie, J. K., Havasy, C. K., Jenkins, T. J., Nakano, K., Pettiford, C. I., Quach, T. K., Sewell, J. S., & Via, G. D. (1996). Wet chemical digital etching of GaAs at room temperature. Journal of the Electrochemical Society, 143(11), 3652-3656. https://doi.org/10.1149/1.1837266

@article{1703fbf60eb84a7d924d3f2c0cc48600,

title = "Wet chemical digital etching of GaAs at room temperature",

author = "DeSalvo, \{Gregory C.\} and Bozada, \{Christopher A.\} and Ebel, \{John L.\} and Look, \{David C.\} and Barrette, \{John P.\} and Cerny, \{Charles L.A.\} and Dettmer, \{Ross W.\} and Gillespie, \{James K.\} and Havasy, \{Charles K.\} and Jenkins, \{Thomas J.\} and Kenichi Nakano and Pettiford, \{Carl I.\} and Quach, \{Tony K.\} and Sewell, \{James S.\} and Via, \{G. David\}",

year = "1996",

month = nov,

doi = "10.1149/1.1837266",

language = "English",

volume = "143",

pages = "3652--3656",

journal = "Journal of the Electrochemical Society",

issn = "0013-4651",

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TY - JOUR

T1 - Wet chemical digital etching of GaAs at room temperature

AU - DeSalvo, Gregory C.

AU - Bozada, Christopher A.

AU - Ebel, John L.

AU - Look, David C.

AU - Barrette, John P.

AU - Cerny, Charles L.A.

AU - Dettmer, Ross W.

AU - Gillespie, James K.

AU - Havasy, Charles K.

AU - Jenkins, Thomas J.

AU - Nakano, Kenichi

AU - Pettiford, Carl I.

AU - Quach, Tony K.

AU - Sewell, James S.

AU - Via, G. David

PY - 1996/11

Y1 - 1996/11

UR - https://www.scopus.com/pages/publications/0030290762

UR - https://www.scopus.com/pages/publications/0030290762#tab=citedBy

U2 - 10.1149/1.1837266

DO - 10.1149/1.1837266

M3 - Article

AN - SCOPUS:0030290762

SN - 0013-4651

VL - 143

SP - 3652

EP - 3656

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

IS - 11

ER -

Wet chemical digital etching of GaAs at room temperature

ASJC Scopus Subject Areas

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