Wet chemical digital etching of GaAs at room temperature

Gregory C. DeSalvo; Christopher A. Bozada; John L. Ebel; David C. Look; John P. Barrette; Charles L.A. Cerny; Ross W. Dettmer; James K. Gillespie; Charles K. Havasy; Thomas J. Jenkins; Kenichi Nakano; Carl I. Pettiford; Tony K. Quach; James S. Sewell; G. David Via

doi:10.1149/1.1837266

Wet chemical digital etching of GaAs at room temperature

Gregory C. DeSalvo, Christopher A. Bozada, John L. Ebel, David C. Look, John P. Barrette, Charles L.A. Cerny, Ross W. Dettmer, James K. Gillespie, Charles K. Havasy, Thomas J. Jenkins, Kenichi Nakano, Carl I. Pettiford, Tony K. Quach, James S. Sewell, G. David Via

Future of Semiconductors, a National Science Foundation Program

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	3652-3656
Number of pages	5
Journal	Journal of the Electrochemical Society
Volume	143
Issue number	11
DOIs	https://doi.org/10.1149/1.1837266
State	Published - Nov 1996

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Renewable Energy, Sustainability and the Environment
Condensed Matter Physics
Surfaces, Coatings and Films
Electrochemistry
Materials Chemistry

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10.1149/1.1837266

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DeSalvo, G. C., Bozada, C. A., Ebel, J. L., Look, D. C., Barrette, J. P., Cerny, C. L. A., Dettmer, R. W., Gillespie, J. K., Havasy, C. K., Jenkins, T. J., Nakano, K., Pettiford, C. I., Quach, T. K., Sewell, J. S., & Via, G. D. (1996). Wet chemical digital etching of GaAs at room temperature. Journal of the Electrochemical Society, 143(11), 3652-3656. https://doi.org/10.1149/1.1837266

@article{1703fbf60eb84a7d924d3f2c0cc48600,

title = "Wet chemical digital etching of GaAs at room temperature",

author = "DeSalvo, \{Gregory C.\} and Bozada, \{Christopher A.\} and Ebel, \{John L.\} and Look, \{David C.\} and Barrette, \{John P.\} and Cerny, \{Charles L.A.\} and Dettmer, \{Ross W.\} and Gillespie, \{James K.\} and Havasy, \{Charles K.\} and Jenkins, \{Thomas J.\} and Kenichi Nakano and Pettiford, \{Carl I.\} and Quach, \{Tony K.\} and Sewell, \{James S.\} and Via, \{G. David\}",

year = "1996",

month = nov,

doi = "10.1149/1.1837266",

language = "English",

volume = "143",

pages = "3652--3656",

journal = "Journal of the Electrochemical Society",

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TY - JOUR

T1 - Wet chemical digital etching of GaAs at room temperature

AU - DeSalvo, Gregory C.

AU - Bozada, Christopher A.

AU - Ebel, John L.

AU - Look, David C.

AU - Barrette, John P.

AU - Cerny, Charles L.A.

AU - Dettmer, Ross W.

AU - Gillespie, James K.

AU - Havasy, Charles K.

AU - Jenkins, Thomas J.

AU - Nakano, Kenichi

AU - Pettiford, Carl I.

AU - Quach, Tony K.

AU - Sewell, James S.

AU - Via, G. David

PY - 1996/11

Y1 - 1996/11

UR - https://www.scopus.com/pages/publications/0030290762

UR - https://www.scopus.com/inward/citedby.url?scp=0030290762&partnerID=8YFLogxK

U2 - 10.1149/1.1837266

DO - 10.1149/1.1837266

M3 - Article

AN - SCOPUS:0030290762

SN - 0013-4651

VL - 143

SP - 3652

EP - 3656

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

IS - 11

ER -

Wet chemical digital etching of GaAs at room temperature

ASJC Scopus Subject Areas

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