X-ray diffraction from quantum wires and quantum dots

Yan Zhuang, J. Stangl, Anton A. Darhuber, G. Bauer, P. Mikulik, V. Holý, N. Darowski, U. Pietsch

Research output: Contribution to journalMeeting abstractpeer-review

Abstract

From the distribution of the scattered intensity in reciprocal space, information on the shape as well as on the strain distribution in nanostructured samples can be obtained. This is exemplified by applying this method to laterally patterned periodic Si/SiGe superlattices as well as to periodic SiGe dot arrays embedded in Si.
Original languageAmerican English
Pages (from-to)215–221
JournalJournal of Materials Science: Materials in Electronics
Volume10
StatePublished - May 1999
Externally publishedYes

Keywords

  • X-ray diffraction
  • Quantum wires
  • Quantum dots

Disciplines

  • Electrical and Computer Engineering

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