Abstract
In this work, the application of advanced X-ray scattering methods to the study of mesoscopic and low-dimensional heterostructures is briefly reviewed. Semiconductor quantum wire arrays, periodically corrugated surfaces (surface gratings) and quantum dots are investigated by high-resolution double-crystal X-ray diffraction and high- and low-angle reciprocal space mapping. It is shown that high-resolution X-ray experiments can provide useful and accurate information on the geometrical parameters and structural properties of low-dimensional semiconductor heterostructures.
Original language | American English |
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Number of pages | 49 |
Journal | Thin Solid Films |
Volume | 319 |
Issue number | 1-2 |
DOIs | |
State | Published - Apr 1998 |
Externally published | Yes |
Keywords
- X-ray diffraction
- Surface morphology
- Nanostructures
Disciplines
- Electrical and Computer Engineering