X-ray scattering study of quantum wires and lateral periodic heterostructures

L. Tapfer, L. De Caro, Yan Zhuang, P. Sciacovelli, A. Sacchetti

Research output: Contribution to journalArticlepeer-review

Abstract

In this work, the application of advanced X-ray scattering methods to the study of mesoscopic and low-dimensional heterostructures is briefly reviewed. Semiconductor quantum wire arrays, periodically corrugated surfaces (surface gratings) and quantum dots are investigated by high-resolution double-crystal X-ray diffraction and high- and low-angle reciprocal space mapping. It is shown that high-resolution X-ray experiments can provide useful and accurate information on the geometrical parameters and structural properties of low-dimensional semiconductor heterostructures.
Original languageAmerican English
Number of pages49
JournalThin Solid Films
Volume319
Issue number1-2
DOIs
StatePublished - Apr 1998
Externally publishedYes

Keywords

  • X-ray diffraction
  • Surface morphology
  • Nanostructures

Disciplines

  • Electrical and Computer Engineering

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